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Publication : microelectronics reliability Format : Academic Journals

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Academic Journal

Advanced FIB sample preparation techniques for high resolution TEM investigations of HEMT structures

Authors : Simon-Najasek, Michél ^⁎; Huebner, Susanne; Altmann, Frank

Source: In Microelectronics Reliability September-October 2014 54(9-10):1785-1789

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