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Publisher : edp sciences Publication : itm web of conferences

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Academic Journal

The effect of gas pressure during ion-plasma deposition on the microstructure of M-coatings and the emission properties of molecular sputter-deposited oxide cathodes

Authors : Zhabin Gennady; Arkhipov Denis

Subjects: Information technology; T58.5-58.64

Source: ITM Web of Conferences, Vol 30, p 02006 (2019)

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The effect of gas pressure during ion-plasma deposition on the microstructure of M-coatings and the emission properties of molecular sputter-deposited oxide cathodes

Authors : Denis Arkhipov; Gennady Zhabin

Subjects: lcsh:Information technology; lcsh:T58.5-58.64; Deposition (law)

Source: ITM Web of Conferences, Vol 30, p 02006 (2019)

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